Items | Description |
---|---|
•  Magnification |    x 100 ~ 8000 |
•  Prove Current |    10 pA ~ 1 nA |
•  Accelerating Voltage |    1 ~ 10 kV |
•  Specimen Size |    12 ~ 25 mm |
•  Specimen Traverse |    X: ±7.5 mm, Y: ±12.5 mm, Z: 5 ~ 30 mm,    T: 10˚ ~ 60˚, R: Endless |
•  Resolution |    80 nm |
•  Detector |    Everhart-Thornley Detector    PIN-Diode Detector |
•  Vacuum Pump |    Turbo Molecular Pump (300L/min),    Rotary Pump (400L/min) |