| Items | Description |
|---|---|
| • Magnification | x 100 ~ 8000 |
| • Prove Current | 10 pA ~ 1 nA |
| • Accelerating Voltage | 1 ~ 10 kV |
| • Specimen Size | 12 ~ 25 mm |
| • Specimen Traverse | X: ±7.5 mm, Y: ±12.5 mm, Z: 5 ~ 30 mm, T: 10˚ ~ 60˚, R: Endless |
| • Resolution | 80 nm |
| • Detector | Everhart-Thornley Detector PIN-Diode Detector |
| • Vacuum Pump | Turbo Molecular Pump (300L/min), Rotary Pump (400L/min) |
